High precision automated measurement system for 3D analysis of surface texture at the nanoscale

Authors

  • Valery Poroshin Moscow State Industrial University, Science Department
  • Dmitry Bogomolov Moscow State Industrial University, Science Department
  • Oleg Poroshin Moscow State Industrial University, Science Department
  • Valery Lyssenko Russian Research Institute for Metrological Service

DOI:

https://doi.org/10.32972/dms.2014.015

Keywords:

surface topography, nanoscale, measurement system, automation

Abstract

The automated PC based measurement system for high precision 3D analysis of surface texture at the nanoscale is described. Measurement system is based on the atomic-force metrological microscope with modified specimen table having extended horizontal range. System implies the 3D surface texture analysis according to recent standard ISO 25178-2:2012.

References

Whitehouse, D. J. Handbook of Surface and Nanometrology. Second Edition, CRC Press, 2010, pp. 999. https://doi.org/10.1201/b10415

Geometric Product Specification (GPS) - Surface texture: Profile method - Terms, definition and surface texture parameters. International Standard ISO 4287:1997.

Geometric Product Specification (GPS) - Surface texture: areal - Part 2: Terms, definitions and surface texture parameters. International Standard ISO 25178-2:2012.

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Published

2014-11-30

How to Cite

Poroshin, V., Bogomolov, D., Poroshin, O., & Lyssenko, V. (2014). High precision automated measurement system for 3D analysis of surface texture at the nanoscale. Design of Machines and Structures, 4(2), 27–34. https://doi.org/10.32972/dms.2014.015

Issue

Vol. 4 No. 2 (2014): Design of Machines and Structures

Section

Articles