Different methods for 3D measurement of surface roughness etalons

Authors

  • Valery Lyssenko Russian Research Institute for Metrological Service
  • Serguey Kononogov Russian Research Institute for Metrological Service
  • Serguey Zolotarevskiy Russian Research Institute for Metrological Service

DOI:

https://doi.org/10.32972/dms.2014.014

Keywords:

scanning probe microscope, interference microscope, contact stylus profilometer, nanometrology

Abstract

Scanning probe microscopes (SPM) are a family of instruments used for studying surface topography. But it is difficult to select object for testing SPMs. So the investigation of metrological characteristics of the atomic-force microscope (AFM) “NanoScan” (Russia), AFM “Nanotop” (Belarus) SPM P4-SPM-MDT (Russia) devices Talystep and Nanostep, Interference-microscope was worked out.

References

Kononogov, S.–Lyssenko, V.: High precision PC based measurement system for etalon roughness analysis. International Journal Advanced Engineering, No. 2 (2008).

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Published

2014-11-30

How to Cite

Lyssenko, V., Kononogov, S., & Zolotarevskiy, S. (2014). Different methods for 3D measurement of surface roughness etalons. Design of Machines and Structures, 4(2), 19–25. https://doi.org/10.32972/dms.2014.014

Issue

Vol. 4 No. 2 (2014): Design of Machines and Structures

Section

Articles